The fluorine doped cadmium oxide samples have been deposited at 250 degrees C by ultrasonic spray pyrolysis method. X-ray diffraction patterns of the CdO:F samples have revealed that the samples are polycrystalline with cubic sodium chloride structure. The texture coefficients calculated for various planes at different fluorine concentrations indicate that the samples have exhibited (11 1) and (200) preferential orientations. The lattice parameters for cubic structure of each diffraction plane have been calculated. The crystallite size of the samples being nearly constant until 4% of fluorine doping showed reasonable decrease above this concentration value. The macro strain and dislocation density vary with fluorine concentrations. (c) 2007 Elsevier B.V. All rights reserved.