Electrical characteristics for capacitively coupled radio frequency discharges of helium and neon

TANIŞLI M., ŞAHİN N., DEMİR S.

PRAMANA-JOURNAL OF PHYSICS, cilt.89, sa.3, 2017 (SCI-Expanded) identifier identifier

  • Yayın Türü: Makale / Tam Makale
  • Cilt numarası: 89 Sayı: 3
  • Basım Tarihi: 2017
  • Doi Numarası: 10.1007/s12043-017-1435-7
  • Dergi Adı: PRAMANA-JOURNAL OF PHYSICS
  • Derginin Tarandığı İndeksler: Science Citation Index Expanded (SCI-EXPANDED), Scopus
  • Anahtar Kelimeler: Discharge in vacuum, electric and magnetic measurements, plasma properties, high frequency and RF discharge, homogeneous discharge model of CCRF
  • Anadolu Üniversitesi Adresli: Evet

Özet

In this study, a symmetric radio frequency (RF) (13.56 MHz) electrode discharge system of simple geometry has been designed and made. The electrical properties of capacitive RF discharge of pure neon and pure helium have been obtained from current and voltage waveforms using different reactor designs. Calculations are done, in detail, according to the homogeneous discharge model of capacitively coupled RF. Electrical properties of bulk plasma and sheath capacitance are also investigated at low pressure using this model.