Electrical characteristics for capacitively coupled radio frequency discharges of helium and neon

TANIŞLI M., ŞAHİN N., DEMİR S.

PRAMANA-JOURNAL OF PHYSICS, vol.89, no.3, 2017 (SCI-Expanded) identifier identifier

  • Publication Type: Article / Article
  • Volume: 89 Issue: 3
  • Publication Date: 2017
  • Doi Number: 10.1007/s12043-017-1435-7
  • Journal Name: PRAMANA-JOURNAL OF PHYSICS
  • Journal Indexes: Science Citation Index Expanded (SCI-EXPANDED), Scopus
  • Keywords: Discharge in vacuum, electric and magnetic measurements, plasma properties, high frequency and RF discharge, homogeneous discharge model of CCRF
  • Anadolu University Affiliated: Yes

Abstract

In this study, a symmetric radio frequency (RF) (13.56 MHz) electrode discharge system of simple geometry has been designed and made. The electrical properties of capacitive RF discharge of pure neon and pure helium have been obtained from current and voltage waveforms using different reactor designs. Calculations are done, in detail, according to the homogeneous discharge model of capacitively coupled RF. Electrical properties of bulk plasma and sheath capacitance are also investigated at low pressure using this model.