Synthesis of compositionally different multicomponent metal-oxide films (SnO2)(x)(ZnO)(1-x) (x=1-0.5)

Rembeza S. I., Kosheleva N. N., Rembeza E. S., Svistova T. V., Plotnikova E. Y., Suvaci E., ...More

SEMICONDUCTORS, vol.48, no.8, pp.1118-1122, 2014 (SCI-Expanded) identifier identifier

  • Publication Type: Article / Article
  • Volume: 48 Issue: 8
  • Publication Date: 2014
  • Doi Number: 10.1134/s106378261408020x
  • Journal Name: SEMICONDUCTORS
  • Journal Indexes: Science Citation Index Expanded (SCI-EXPANDED), Scopus
  • Page Numbers: pp.1118-1122
  • Anadolu University Affiliated: Yes


The study is concerned with high-purity SnO2 and ZnO powders produced from salt solutions of corresponding metals by low-temperature hydrothermal synthesis. Fragments of SnO2 and ZnO ceramic targets formed as 1 x 8 cm bars are fabricated by dry pressing. The bars are used to form composite targets for ion-beam sputtering and the fabrication of compositionally different (SnO2) (x) (ZnO)(1 - x) (x = 1-0.5) films appropriate for the production of gas sensors or transparent electronic devices. The optical and electrical parameters of the films with different compositions are studied.