30th Annual Conference of the IEEE-Photonics-Society (IPC), Florida, United States Of America, 1 - 05 October 2017, pp.561-562
We report on record low-loss single mode a-Al2O3 planar waveguides and growth optimization of a-Er2O3 layers to control erbium-doping level of a-Al2O3 layers realized using Atomic Layer Deposition (ALD). Effect of growth cycle ratio of as grown Er2O3/Al2O3 layers on Photoluminescence (PL) is reported.