In this study, transparent thin films of un-doped and Co-doped nickel oxide were deposited onto microscopic glass substrates using the successive ionic layer adsorption and reaction (SILAR) method. The effect of cobalt doping on structural, morphological and optical properties was investigated. XRD studies reveal that all the films are polycrystalline with cubic structure and exhibit (1 1 1) and (2 2 2) preferential orientations. Co is well incorporated in the host lattice without altering the structure. All films retain high transparency throughout the visible spectral regime. No significant shift in Raman spectra was observed due to the Co doping.