The fluorine doped cadmium oxide (CdO:F) samples have been deposited at 250 degrees C by ultrasonic spray pyrolysis method. Cadmiumacetatdihydrat and ammonium fluoride have been taken as a source of cadmium and fluorine-dopant respectively. The thickness of the CdO:F samples was about 1.4 mu m. X-ray diffraction pattern of the CdO:F samples has revealed that the samples are polycrystalline with cubic sodium chloride structure. There are shifts of the d values (interplanar spacing) for CdO:F samples with respect to standard CdO film. The lattice parameters for cubic structure have been calculated using the Bragg equation. The texture coefficients calculated for various planes at different fluorine concentrations indicate that the samples have exhibited (I 11) and (200) preferential orientations. (c) 2007 Elsevier B.V. All rights reserved.